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US FED.STD.209E

CONTROLLED ROOM CLASSIFICATION STANDARDS

US FED.STD.209E (1992)

Class		Class Limits
Class		0.1μm		0.2μm		0.3μm		0.5μm		5μm
S1	ISO Class	m³	ft³	m³	ft³	m³	ft³	m³	ft³	m³	ft³
M1		350	9.91	75.7	2.14	30.9	0.875	10	0.283
M1.5	1	1240	35	265	7.5	106	3	35.3	1
M2		3500	99.1	757	21.4	309	8.75	100	2.83
M2.5	10	12400	350	2650	75	1060	30	353	10
M3		35000	991	7570	214	3090	87.5	1000	28.3
M3.5	100			36500	750	10600	300	3530	100
M4				75700	2140	30900	875	10000	283
M4.5	1000							35300	1000	247	7
M5								100000	2830	618	17.5
M5.5	10,000							353000	10000	2470	70
M6								1000000	28300	6180	175
M6.5	100,000							3530000	100000	24700	700
M7								10000000	283000	61800	1750

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